Informations générales
Number of hours
- Lectures 6
- Projects 8
ECTSECTS
1
Goal(s)
- general knowledge on MEMS:
µ-sensors, µ-actuators, µ-generators and µ-sources of energy
also the basic micro-technology for MEMS and the specific materials
Responsible(s)
Cugat O.
Contact details
Cugat O.
Content(s)
LECTURE:
A) the various types of MEMS
-sensors
- actuators
- generators
B) the physical principles exploited:
- mechanics
- electrostatics
- thermal
- magnetism
- piezoelectricity
C) overview of the µ-technological fabrication processes
- photolithography
- silicon etching
- electroplating
- sputtering
- µ-photo-stereo-lithography
TUTORIALS 8 h :
experiments on a µ-source of energy to supply power to a personnal high-tech device (iPod, phone...)
PREREQUISITES:
general technical culture and a bit of common sense
Test
technical reports of lab work
Calendar
S3
Additional Information
14 h (6 h CM + 8 h BE)
Bibliography
www.trimmer.net
www.esiee.fr/~francaio/recherche/recher.html
French State controlled diploma conferring a Master's degree
